TY - GEN

AU - Schroeder, Sven

AU - Kamprath, Mathias

AU - Gliech, Stefan

AU - Duparre, Angela

TI - Scatter analysis of optical components from 193 nm to 13.5 nm

PB - SPIE

SN - 0277-786X

PY - 2005

UR - http://slubdd.de/katalog?TN_libero_mab2

ER -