TY - GEN
AU - Kalus, Christian K.
AU - Buß, Hinderk M.
AU - Brooker, Peter D.
TI - In quest of predictive lithography simulation
PB - SPIE
SN - 0277-786X
PY - 2006
UR - https://katalog.slub-dresden.de/en/?cHash=0bb8bd27a7fbde41cd02875a74ca0f3d&tx_find_find%5Baction%5D=citation&tx_find_find%5Bcontroller%5D=Search&tx_find_find%5Bid%5D=ai-49-aHR0cDovL2R4LmRvaS5vcmcvMTAuMTExNy8xMi42NTQ3NzA&tx_find_find%5Btype%5D=ris
ER -
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