TY - GEN
AU - Prater, Karin
AU - Dukwen, Julia
AU - Scharf, Toralf
AU - Herzig, Hans Peter
AU - Plöger, Sven
AU - Hermerschmidt, Andreas
TI - Multilevel micro-structuring of glassy carbon for precision glass molding of diffractive optical elements
PB - SPIE
SN - 0277-786X
PY - 2015
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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