TY - GEN
AU - Lin, Qinghuang
AU - Sooriyakumaran, Ratnam
AU - Huang, Wu-Song
TI - Toward controlled resist line-edge roughness: material origin of line-edge roughness in chemically amplified positive-tone resists
PB - SPIE
SN - 0277-786X
PY - 2000
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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