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  1. Baek, Song Yi; Park, Jingyu; Koh, Taeyoung; Kim, Dohyung; Woo, Jewoung; Jung, Jinwoo; Park, Se Jun; Lee, Changsoo; Choi, Chulhwan

    Achievement of Green and Sustainable CVD Through Process, Equipment and Systematic Optimization in Semiconductor Fabrication

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    Springer Science and Business Media LLC, 2024

    Published in: International Journal of Precision Engineering and Manufacturing-Green Technology, 11 (2024) 4, Seite 1295-1316

  2. Baek, Song Yi; Park, Jingyu; Koh, Taeyoung; Kim, Dohyung; Woo, Jewoung; Jung, Jinwoo; Park, Se Jun; Lee, Changsoo; Choi, Chulhwan

    Correction: Achievement of Green and Sustainable CVD Through Process, Equipment and Systematic Optimization in Semiconductor Fabrication

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    Springer Science and Business Media LLC, 2024

    Published in: International Journal of Precision Engineering and Manufacturing-Green Technology, 11 (2024) 4, Seite 1435-1435