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  1. Smith, Gabriel L.; Pulskamp, Jeffrey S.; Sanchez, Luz M.; Potrepka, Daniel M.; Proie, Robert M.; Ivanov, Tony G.; Rudy, Ryan Q.; Nothwang, William D.; Bedair, Sarah S.; Meyer, Christopher D.; Polcawich, Ronald G.

    PZT‐Based Piezoelectric MEMS Technology

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    Wiley, 2012

    Published in: Journal of the American Ceramic Society, 95 (2012) 6, Seite 1777-1792