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Boca Raton, Fla.[u.a.]: CRC [u.a.], 20XX-
Published in:Mechanical engineering series
Geßner, Thomas
[Editor]
;
Mesago Messe Frankfurt,
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration,
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 1 2007 Paris,
European Conference & Exhibition on Integration Issues of Miniaturized Systems 1 2007 Paris
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Boston [u.a.]: Artech House, 2000
Published in:Artech House microelectromechanical systems library
Setiono, Andi
[Author]
;
Peiner, Erwin
[Degree supervisor];
Kowalsky, Wolfgang
[Degree supervisor]Technische Universität Braunschweig,
Verlag Dr. Hut München
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Berlin; Boston: De Gruyter, [2022]
Published in:De Gruyter STEM
Geßner, Thomas
[Editor]
;
Mesago Messe Frankfurt,
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 4 2010 Como