author = { McGuire, Gary E. AND MacGuire, Gary E. },

title = { Semiconductor materials and process technology handbook for very large scale integration (VLSI) and ultra large scale integration (ULSI) },

publisher = {Noyes Publ.},

isbn = {0815511507},

keywords = { Integrated circuits Very large scale integration Design and construction , VLSI , Halbleiterwerkstoff , ULSI , Integrierte Schaltung },

year = {1988},

abstract = {Literaturangaben},

booktitle = {Materials science and progress technology series},

address = { Park Ridge, NJ },

url = { http://slubdd.de/katalog?TN_libero_mab2 }