author = { Engl, Walter L. },

title = { Process and device modeling },

publisher = {North-Holland},

isbn = {0444878912},

keywords = { Integrated circuits Design and construction Data processing , Aufsatzsammlung , Mikroelektronik , Simulation , Prozesssimulation , VLSI , Integrierte Schaltung , Mathematisches Modell , Halbleiter },

year = {1986},

booktitle = {Advances in CAD for VLSI ; 1},

address = { Amsterdam [u.a.] },

url = { http://slubdd.de/katalog?TN_libero_mab2 }