@book
{TN_libero_mab2,
author = {
Pimbley, Joseph M.
},
title = {
Advanced CMOS process technology
},
publisher = {Academic Press},
isbn = {0122341198},
keywords = {
Metal oxide semiconductors, Complementary
,
Design and construction
,
VLSI
},
year = {1989},
abstract = {Literaturangaben},
booktitle = {VLSI electronics ; 19},
address = {
San Diego [u.a.]
},
url = {
http://slubdd.de/katalog?TN_libero_mab2
}
}