author = { Herrmann, Diethard },

title = { Schichtdickenmessung mit 43 Tabellen },

publisher = {Oldenbourg},

isbn = {3486222031},

keywords = { Thickness measurement , Thin films Measurement , Schichtdicke , Dickenmessung },

year = {1993},

abstract = {Literaturverz. S. [343] - 350},

address = { München [u.a.] },

url = { http://slubdd.de/katalog?TN_libero_mab2 }