@book
{TN_libero_mab2,
author = {
Menz, Wolfgang
AND
Bley, Peter
},
title = {
Mikrosystemtechnik für Ingenieure
},
publisher = {VCH},
isbn = {3527290036},
keywords = {
Micromechanics
,
Mikrotechnik
,
Lehrbuch
,
Mikrosystemtechnik
,
Systemtechnik
},
year = {1993},
abstract = {Literaturverz. S. 315 - 320},
abstract = {Literaturverz. S. [315] - 320},
address = {
Weinheim [u.a.]
},
url = {
http://slubdd.de/katalog?TN_libero_mab2
}
}