@book
{TN_libero_mab2,
author = {
Stubbe, Kilian
},
title = {
Development and Simulation Assessment of Semiconductor Production System Enhancements for Fast Cycle Times
},
publisher = {},
keywords = {
Hochschulschrift
},
year = {2010},
address = {
},
url = {
http://slubdd.de/katalog?TN_libero_mab2
}
}