author = { Zimmermann, Thomas },

title = { High-rate growth of hydrogenated amorphous and microcrystalline silicon for thin-film silicon solar cells using dynamic very-high frequency plasma-enhanced chemical vapor deposition },

publisher = {Forschungszentrum Jülich},

isbn = {9783893368921},

keywords = { Hochschulschrift , Forschungsbericht , Solarzelle , Mikrokristall , Silicone },

year = {2013},

booktitle = {Schriften des Forschungszentrums Jülich ; Reihe Energie & Umwelt ; Bd. 183},

address = { Jülich },

url = { http://slubdd.de/katalog?TN_libero_mab2 }