author = { Brodie, Ivor AND Muray, Julius J. },

title = { The physics of microfabrication },

edition = { 2. print. } ,

publisher = {Plenum Press},

isbn = {0306408635},

keywords = { Microelectronic devices. Design & manufacture , Integrierte Schaltung , Technologie , Mikroelektronik },

year = {1983},

abstract = {Includes index},

address = { New York [u.a.] },

url = { http://slubdd.de/katalog?TN_libero_mab2 }