author = { Leiderer, Paul AND Mosbacher, Mario AND Dobler, Volker AND Schilling, Andreas AND Yavaṣ, Oğuz AND Luk'jančuk, Boris S. AND Boneberg, Johannes },

title = { Steam laser cleaning of silicon surfaces laser-induced gas bubble nucleation and efficiency measurements },

publisher = {Bibliothek der Universität Konstanz},

year = {2002},

abstract = {Aus: Laser Cleaning / ed. Boris Luk'yanchuk. New Jersey : World Scientific, 2002, S. 255-310},

address = { Konstanz },

url = { http://slubdd.de/katalog?TN_libero_mab2 }