author = { Diekmann, Leonard Frank AND Kassner, Alexander AND Dencker, Folke AND Wurz, Marc Christopher },

title = { Nonevaporable getter-MEMS for generating UHV conditions in small volumina },

publisher = {Gottfried Wilhelm Leibniz Universität Hannover},

publisher = {: Technische Informationsbibliothek (TIB)},

publisher = {: Leibniz Universität Hannover},

year = {2022},

year = {, 2022},

year = {},

address = { Hannover , ; Hannover , ; Hannover },

url = { http://slubdd.de/katalog?TN_libero_mab2 }