@book
{TN_libero_mab2,
author = {
Wasa, Kiyotaka
AND
Hayakawa, Shigeru
},
title = {
Handbook of sputter deposition technology
principles, technology and applications
},
edition = {
Repr. ed.
}
,
publisher = {Noyes Publ.},
isbn = {0815512805},
keywords = {
Sputtern
,
Dünnschichttechnik
},
year = {1992},
abstract = {Literaturangaben},
booktitle = {Materials science and process technology series},
address = {
Park Ridge, N.J.
},
url = {
http://slubdd.de/katalog?TN_libero_mab2
}
}