author = { Madou, Marc J. },

title = { Fundamentals of microfabrication },

publisher = {CRC Press},

isbn = {0849394511},

keywords = { Microelectronics Design and construction , Machining , Engineering (Electronic) , Microelectronics , Integrated circuits , Design and construction , Microelectromechanical systems , Microelectronic packaging , Lasers , Industrial applications , Mikrosystemtechnik , Fertigungstechnik , Lithografie Halbleitertechnologie , Mikromechanik , Entwurf , Konstruktion },

year = {1997},

abstract = {url http://www.biomems.net},

address = { Boca Raton, Fla. [u.a.] },

url = { http://slubdd.de/katalog?TN_libero_mab2 }