author = { Baklanov, Mikhail },

title = { Dielectric films for advanced microelectronics },

publisher = {Wiley},

isbn = {0470013605},

isbn = {9780470013601},

keywords = { Dielectric films , Microelectronics Materials , Dielektrische Schicht , Werkstoff , Mikroelektronik },

year = {2007},

abstract = {Includes bibliographical references and index},

booktitle = {Wiley series in materials for electronic and optoelectronic applications},

address = { Chichester [u.a.] },

url = { http://slubdd.de/katalog?TN_libero_mab2 }