author = { Bakir, Muhannad S. },

title = { Integrated interconnect technologies for 3D nanoelectronic systems },

publisher = {Artech House},

isbn = {9781596932463},

isbn = {1596932465},

keywords = { Interconnects (Integrated circuit technology) , Telecommunication systems , Nanoelectronics , Nanoelektronik , CMOS , Chip },

year = {2009},

abstract = {Literaturangaben},

booktitle = {Artech House Integrated microsystems series},

address = { Boston, Mass. [u.a.] },

url = { http://slubdd.de/katalog?TN_libero_mab2 }