author = { Barz, Jakob Philipp },

title = { Particle dynamics simulation and diagnostics of the PECVD processes in fluorocarbon rf discharges },

publisher = {},

isbn = {9783868534672},

keywords = { Hochschulschrift , Hochfrequenzplasma , Laserinduzierte Fluoreszenz , Simulation },

year = {2010},

abstract = {Druckausg. beim Verl. Dr. Hut, München erschienen},

address = { },

url = { http://slubdd.de/katalog?TN_libero_mab2 }