@book
{TN_libero_mab2,
author = {
Baudrant, Annie
},
title = {
Silicon technologies
ion implantation and thermal treatment
},
publisher = {Wiley},
publisher = {: ISTE [u.a.]},
isbn = {1848212313},
isbn = {9781848212312},
keywords = {
Semiconductor doping
,
Ion implantation
,
Semiconductors Heat treatment
},
year = {2011},
year = {, 2011},
abstract = {Includes bibliographical references and index},
address = {
Hoboken, NJ
,
; London
},
url = {
http://slubdd.de/katalog?TN_libero_mab2
}
}