@misc
{TN_libero_mab2,
author = {
European Workshop: Materials for Advanced Metallization (1997 :Villard-de-Lans, France)
AND
France Ministère de l'éducation nationale, de l'enseignement supérieur, de la recherche et de l'insertion professionnelle
AND
International Union for Vacuum Science, Technique and Applications
AND
IEEE Electron Devices Society
},
title = {
MAM '97, abstracts booklet
European Workshop: Materials for Advanced Metallization, Villard-de-Lans, France, March 16-19, 1997
},
publisher = {Société française du vide},
isbn = {0780339762},
isbn = {9780780339767},
keywords = {
Integrated circuits Very large scale integration Design and construction Congresses
,
Semiconductor-metal boundaries Congresses
,
Metallizing Congresses
,
Konferenzschrift
},
year = {2010},
abstract = {"Supplément à la revue no 283"--Cover},
abstract = {"With the sponsorship of IUVSTA (International Union for Vacuum Science, Technique and Applications), Ministère de l'éducation nationale, de l'enseignement supérieur et de la recherche, IEEE-EDS"--1st prelim. page},
abstract = {Includes bibliographical references and index},
abstract = {Use copy Restrictions unspecified star MiAaHDL},
address = {
Paris, France
},
url = {
https://katalog.slub-dresden.de/en/?cHash=a8fa44d3bda0cb9d524c2f0ab6715df9&tx_find_find%5Baction%5D=citation&tx_find_find%5Bcontroller%5D=Search&tx_find_find%5Bid%5D=0-894514601&tx_find_find%5Btype%5D=bibtex
}
}