author = { European Workshop: Materials for Advanced Metallization (1997 :Villard-de-Lans, France) AND France Ministère de l'éducation nationale, de l'enseignement supérieur, de la recherche et de l'insertion professionnelle AND International Union for Vacuum Science, Technique and Applications AND IEEE Electron Devices Society },

title = { MAM '97, abstracts booklet European Workshop: Materials for Advanced Metallization, Villard-de-Lans, France, March 16-19, 1997 },

publisher = {Société française du vide},

isbn = {0780339762},

isbn = {9780780339767},

keywords = { Integrated circuits Very large scale integration Design and construction Congresses , Semiconductor-metal boundaries Congresses , Metallizing Congresses , Konferenzschrift },

year = {2010},

abstract = {"Supplément à la revue no 283"--Cover},

abstract = {"With the sponsorship of IUVSTA (International Union for Vacuum Science, Technique and Applications), Ministère de l'éducation nationale, de l'enseignement supérieur et de la recherche, IEEE-EDS"--1st prelim. page},

abstract = {Includes bibliographical references and index},

abstract = {Use copy Restrictions unspecified star MiAaHDL},

address = { Paris, France },

url = { https://katalog.slub-dresden.de/en/?cHash=a8fa44d3bda0cb9d524c2f0ab6715df9&tx_find_find%5Baction%5D=citation&tx_find_find%5Bcontroller%5D=Search&tx_find_find%5Bid%5D=0-894514601&tx_find_find%5Btype%5D=bibtex }