author = { Prskalo, Alen-Pilip Schmauder, Siegfried },

title = { Molecular dynamics simulations of Si, SiC and Si3N4 layered systems },

publisher = {Universitätsbibliothek der Universität Stuttgart},

keywords = { Molekulardynamik ; Siliciumcarbid ; Zerstäubung ; Schicht , Nanoindentation , molecular dynamics , nanoindentation , coatings , sputtering , silicon carbide , Hochschulschrift },

year = {2013},

address = { Stuttgart },

url = { https://katalog.slub-dresden.de/en/?cHash=a8fa44d3bda0cb9d524c2f0ab6715df9&tx_find_find%5Baction%5D=citation&tx_find_find%5Bcontroller%5D=Search&tx_find_find%5Bid%5D=13-1035757265&tx_find_find%5Btype%5D=bibtex }