author = { Welzel, Thomas Meichsner, Jürgen AND Vlcek, Jaroslav AND Kersten, Holger },

title = { Time-resolved characterisation of pulsed magnetron discharges for the deposition of thin films with plasma diagnostic methods },

publisher = {Universitätsbibliothek Chemnitz},

keywords = { Time , Thin films , Dünnschichttechnik , Langmuir-Sonde , Massenspektrometrie , Optische Spektroskopie , Plasmadiagnostik , Emissive Probe , Langmuir Probe , Magnetron Sputtering , Magnetronzerstäubung , Mass Spectrometry , Optical Spectroscopy , Plasma Diagnostics , Pulsed Discharges , Pulsplasmen , Thin Film Technology , emissive Sonde },

year = {2010},

address = { Chemnitz },

url = { http://slubdd.de/katalog?TN_libero_mab2 }