author = { Rinderknecht, Jochen },

title = { Phase formation and size effects in nanoscale silicide layers for the sub-100 nm microprocessor technology },

keywords = { CMOS ; Dünne Schicht ; Mikroprozessor ; Schichtdicke ; Silicide , Hochschulschrift },

year = {2005},

url = { http://slubdd.de/katalog?TN_libero_mab2 }