author = { Ligl, Jana AND Leone, Stefano AND Manz, Christian AND Kirste, Lutz AND Doering, Philipp AND Fuchs, Theodor AND Prescher, Mario AND Ambacher, Oliver },

title = { Metalorganic chemical vapor phase deposition of AlScN/GaN heterostructures },

publisher = {AIP Publishing},

isbn = {0021-8979},

isbn = {1089-7550},

year = {2020},

url = { http://slubdd.de/katalog?TN_libero_mab2 }