@misc {TN_libero_mab2,
author = { Higashi, Yasuo AND Takaie, Yuichi AND Endo, Katsuyoshi AND Kume, Tatsuya AND Enami, Kazuhiro AND Yamauchi, Kazuto AND Yamamura, Kazuya AND Sano, Yasuhisa AND Ueno, Kenji AND Mori, Yuzo },
title = { Surface Gradient Integrated Profiler for X-ray and EUV Optics—Calibration of the rotational angle error of the rotary encoders },
publisher = {AIP},
isbn = {0094-243X},
year = {2007},
url = { http://slubdd.de/katalog?TN_libero_mab2 }
}
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