@misc
{TN_libero_mab2,
author = {
Higashi, Yasuo
AND
Takaie, Yuichi
AND
Endo, Katsuyoshi
AND
Kume, Tatsuya
AND
Enami, Kazuhiro
AND
Yamauchi, Kazuto
AND
Yamamura, Kazuya
AND
Sano, Yasuhisa
AND
Ueno, Kenji
AND
Mori, Yuzo
},
title = {
Surface Gradient Integrated Profiler for X-ray and EUV Optics—Calibration of the rotational angle error of the rotary encoders
},
publisher = {AIP},
isbn = {0094-243X},
year = {2007},
url = {
http://slubdd.de/katalog?TN_libero_mab2
}
}