author = { Guenther, Kay-Michael AND Gimpel, Thomas AND Kontermann, Stefan AND Schade, Wolfgang },

title = { Investigation of the sulfur doping profile in femtosecond-laser processed silicon },

publisher = {AIP Publishing},

isbn = {1077-3118},

isbn = {0003-6951},

year = {2013},

url = { http://slubdd.de/katalog?TN_libero_mab2 }