author = { Harendt, Christine AND Hofflinger, Bernd AND Graf, Heinz-Gerd AND Penteker, Elisabeth },

title = { Silicon direct bonding for sensor applications: Characterization of the bond quality },

publisher = {Elsevier BV},

isbn = {0924-4247},

keywords = { Electrical and Electronic Engineering , Metals and Alloys , Surfaces, Coatings and Films , Condensed Matter Physics , Instrumentation , Electronic, Optical and Magnetic Materials },

year = {1990},

url = { http://slubdd.de/katalog?TN_libero_mab2 }