author = { Knyazev, M.A. AND Svintsov, A.A. AND Zaitsev, S.I. },

title = { Influence of the dose distribution on resist development properties },

publisher = {Elsevier BV},

isbn = {0167-9317},

keywords = { Electrical and Electronic Engineering , Surfaces, Coatings and Films , Condensed Matter Physics , Atomic and Molecular Physics, and Optics , Electronic, Optical and Magnetic Materials },

year = {2010},

url = { http://slubdd.de/katalog?TN_libero_mab2 }