author = { Dogan, P. AND Rudigier, E. AND Fenske, F. AND Lee, K.Y. AND Gorka, B. AND Rau, B. AND Conrad, E. AND Gall, S. },

title = { Structural and electrical properties of epitaxial Si layers prepared by E-beam evaporation },

publisher = {Elsevier BV},

isbn = {0040-6090},

keywords = { Materials Chemistry , Metals and Alloys , Surfaces, Coatings and Films , Surfaces and Interfaces , Electronic, Optical and Magnetic Materials },

year = {2008},

url = { http://slubdd.de/katalog?TN_libero_mab2 }