author = { Pearton, S.J. },

title = { Characterization of damage in electron cyclotron resonance plasma etched compound semiconductors },

publisher = {Elsevier BV},

isbn = {0169-4332},

keywords = { Surfaces, Coatings and Films , Condensed Matter Physics , Surfaces and Interfaces , General Physics and Astronomy , General Chemistry },

year = {1997},

url = { http://slubdd.de/katalog?TN_libero_mab2 }