author = { Masi, Maurizio AND Bertani, Valeria AND Cavallotti, Carlo AND Carrà, Sergio },

title = { Towards a multiscale approach to the growth of silicon films by chemical vapor deposition },

publisher = {Elsevier BV},

isbn = {0254-0584},

keywords = { Condensed Matter Physics , General Materials Science },

year = {2000},

url = { http://slubdd.de/katalog?TN_libero_mab2 }