author = { Nehm, Frederik AND Klumbies, Hannes AND Richter, Claudia AND Singh, Aarti AND Schroeder, Uwe AND Mikolajick, Thomas AND Mönch, Tobias AND Hoßbach, Christoph AND Albert, Matthias AND Bartha, Johann W. AND Leo, Karl AND Müller-Meskamp, Lars },

title = { Breakdown and Protection of ALD Moisture Barrier Thin Films },

publisher = {American Chemical Society (ACS)},

isbn = {1944-8244},

isbn = {1944-8252},

keywords = { General Materials Science },

year = {2015},

url = { http://slubdd.de/katalog?TN_libero_mab2 }