author = { Cao, Zhibo AND Goritz, Alexander AND Stocchi, Matteo AND Wietstruck, Matthias AND Hoyer, Christian AND Steinweg, Luca David AND Carta, Corrado AND Ellinger, Frank AND Tillack, Bernd AND Kaynak, Mehmet },

title = { An Advanced Finite Element Model for BiCMOS Process Oriented Ultra-Thin Wafer Deformation },

publisher = {Institute of Electrical and Electronics Engineers (IEEE)},

isbn = {0894-6507},

isbn = {1558-2345},

keywords = { Electrical and Electronic Engineering , Industrial and Manufacturing Engineering , Condensed Matter Physics , Electronic, Optical and Magnetic Materials },

year = {2022},

url = { http://slubdd.de/katalog?TN_libero_mab2 }