author = { Strahm, B. AND Howling, A. A. AND Sansonnens, L. AND Hollenstein, Ch. },

title = { Optimization of the microcrystalline silicon deposition efficiency },

publisher = {American Vacuum Society},

isbn = {0734-2101},

isbn = {1520-8559},

keywords = { Surfaces, Coatings and Films , Surfaces and Interfaces , Condensed Matter Physics },

year = {2007},

url = { http://slubdd.de/katalog?TN_libero_mab2 }