author = { Palov, Alexander P. AND Baklanov, Mikhail R. AND Wei, Shuhua },

title = { Dependence of dielectric constant of hydrocarbon bridged low-k films on porosity },

publisher = {American Vacuum Society},

isbn = {2166-2746},

isbn = {2166-2754},

keywords = { Materials Chemistry , Electrical and Electronic Engineering , Surfaces, Coatings and Films , Process Chemistry and Technology , Instrumentation , Electronic, Optical and Magnetic Materials },

year = {2019},

url = { http://slubdd.de/katalog?TN_libero_mab2 }