author = { Bajt, Saša },

title = { Oxidation resistance and microstructure of ruthenium-capped extreme ultraviolet lithography multilayers },

publisher = {SPIE-Intl Soc Optical Eng},

isbn = {1932-5150},

keywords = { Electrical and Electronic Engineering , Mechanical Engineering , Condensed Matter Physics , Atomic and Molecular Physics, and Optics , Electronic, Optical and Magnetic Materials },

year = {2006},

url = { http://slubdd.de/katalog?TN_libero_mab2 }