author = { Schroeder, Sven AND Kamprath, Mathias AND Gliech, Stefan AND Duparre, Angela },

title = { Scatter analysis of optical components from 193 nm to 13.5 nm },

publisher = {SPIE},

isbn = {0277-786X},

year = {2005},

url = { http://slubdd.de/katalog?TN_libero_mab2 }