author = { Sierakowski, Andrzej AND Janus, Paweł AND Kopiec, Daniel AND Nieradka, Konrad AND Domanski, Krzysztof AND Grabiec, Piotr AND Gotszalk, Teodor },

title = { Optimization method of photolithography process by means of atomic force microscopy },

publisher = {SPIE},

isbn = {0277-786X},

year = {2012},

url = { http://slubdd.de/katalog?TN_libero_mab2 }