author = { Schmitt, Dirk-Roger AND Ringel, Gabriele A. AND Kratz, Frank },

title = { Roughness measurement on supersmooth surfaces with an optical heterodyne profiler },

publisher = {SPIE},

isbn = {0277-786X},

year = {1994},

url = { http://slubdd.de/katalog?TN_libero_mab2 }