@misc
{TN_libero_mab2,
author = {
Lin, Qinghuang
AND
Sooriyakumaran, Ratnam
AND
Huang, Wu-Song
},
title = {
Toward controlled resist line-edge roughness: material origin of line-edge roughness in chemically amplified positive-tone resists
},
publisher = {SPIE},
isbn = {0277-786X},
year = {2000},
url = {
http://slubdd.de/katalog?TN_libero_mab2
}
}