author = { Wu, Yating AND Shang, Hongpeng AND Zheng, Xiaorui AND Chu, Tao },

title = { Post-Processing Trimming of Silicon Photonic Devices Using Femtosecond Laser },

publisher = {MDPI AG},

isbn = {2079-4991},

year = {2023},

url = { http://slubdd.de/katalog?TN_libero_mab2 }