author = { Sha, Jin AND Yao, Zhi Yuan AND Jiao, Yang },

title = { An Ultrasonic Knife System for MEMS Packaging },

publisher = {Trans Tech Publications, Ltd.},

isbn = {1662-7482},

keywords = { General Engineering },

year = {2012},

url = { http://slubdd.de/katalog?TN_libero_mab2 }