%0 Book
%T Diffusion phenomena in thin films and microelectronic materials
%A Gupta, Devendra
%A Ho, Paul S.
%I Noyes Publ.
%@ 0815511671
%K Diffusion
%K Thin films
%K Microstructure
%K Semiconductors Diffusion
%K Dünne Schicht
%D 1988
%X Literaturangaben
%C Noyes Publ.
%C Park Ridge, N.J.
%U http://slubdd.de/katalog?TN_libero_mab2
Download citation