%0 Journal
%T Journal of vacuum science & technology the official journal of the American Vacuum Society
%A American Vacuum Society
%I Inst.
%@ 0022-5355
%K Zeitschrift
%K Vakuumtechnik
%D 1964-1982
%C Inst.
%C New York, NY
%U http://slubdd.de/katalog?TN_libero_mab2
Download citation