%0
Book
%T
Micro process engineering
fundamentals, devices, fabrication, and applications
%A
Kockmann, Norbert
%I
Wiley-VCH
%@
9783527335008
%K
Mikroverfahrenstechnik
%D
2013
%C
Wiley-VCH
%C
Weinheim
%U
http://slubdd.de/katalog?TN_libero_mab2
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