%0 Book
%T High-rate growth of hydrogenated amorphous and microcrystalline silicon for thin-film silicon solar cells using dynamic very-high frequency plasma-enhanced chemical vapor deposition
%A Zimmermann, Thomas
%I Forschungszentrum Jülich
%@ 9783893368921
%K Hochschulschrift
%K Forschungsbericht
%K Solarzelle
%K Mikrokristall
%K Silicone
%D 2013
%C Forschungszentrum Jülich
%C Jülich
%U http://slubdd.de/katalog?TN_libero_mab2
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